SCMOS Layout Rules - Overglass
Note that rules in this section are in units of microns. They are
not "true" design rules, but they do make good practice
rules. Unfortunately, there are no really good generic pad design
rules since pads are process-specific.
| Rule |
Description |
Microns |
| 10.1 |
Minimum bonding pad width |
100 x 100 |
| 10.2 |
Minimum probe pad width |
75 x 75 |
| 10.3 |
Pad metal overlap of glass opening |
6 |
| 10.4 |
Minimum pad spacing to unrelated metal |
30 |
| 10.5 |
Minimum pad spacing to unrelated active, poly or poly2 |
15 |
