SCMOS Layout Rules - Via1

Rule Description Lambda
8.1 Exact size 2 x 2
8.2 Minimum via1 spacing 3
8.3 Minimum overlap by metal1 1
8.4 Minimum spacing to contact 2
8.5 Minimum spacing to poly or active edge
(SCMOS only, not SUBM, DEEP)
2

 

SCMOS Layout Rules - Metal2

Rule Description Lambda
9.1 Minimum width 3
9.2.a Minimum spacing 4
9.2.b Minimum tight metal or SUBM spacing
(only allowed between minimum width wires -
otherwise, use regular spacing rule)
3
9.3 Minimum overlap of via1 1