Rule | Description | Lambda |
---|---|---|
8.1 | Exact size | 2 x 2 |
8.2 | Minimum via1 spacing | 3 |
8.3 | Minimum overlap by metal1 | 1 |
8.4 | Minimum spacing to contact | 2 |
8.5 | Minimum spacing to poly or active edge
(SCMOS only, not SUBM, DEEP) |
2 |
Rule | Description | Lambda |
---|---|---|
9.1 | Minimum width | 3 |
9.2.a | Minimum spacing | 4 |
9.2.b | Minimum tight metal or SUBM spacing
(only allowed between minimum width wires - otherwise, use regular spacing rule) |
3 |
9.3 | Minimum overlap of via1 | 1 |