SCMOS Layout Rules - Via2

Rule	Description	Lambda
14.1	Exact size	2 x 2
14.2	Minimum spacing	3
14.3	Minimum overlap by metal2	1
14.4	Minimum spacing to via1	2
14.5	Via2 may be placed over contact

 

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SCMOS Layout Rules - Metal3

Rule	Description	Lambda
15.1	Minimum width	6 [SUBM 5]
15.2	Minimum spacing to metal3	4 [SUBM 3]
15.3	Minimum overlap of via2	2