SCMOS Layout Rules - Poly

Rule Description Lambda
3.1 Minimum width 2
3.2 Minimum spacing
over field
2
[SUBM 3]
3.2.a Minimum spacing
over active
2 [SUBM 3]
[DEEP 4]
3.3 Minimum gate extension of active 2
3.4 Minimum active extension of poly 3
3.5 Minimum field poly to active 1