| Rule | Description | Lambda |
|---|---|---|
| 4.1 | Minimum select spacing to channel of transistor
to ensure adequate source/drain width |
3 |
| 4.2 | Minimum select overlap of active | 2 |
| 4.3 | Minimum select overlap of contact | 1 |
| 4.4 | Minimum select width and spacing
(Note: P-select and N-select may be coincident, but must not overlap) (not illustrated) |
2 |